Particulars Scanning-TCT beam monitors

Beam monitors are used to verify the intensity of the laser beam during the measurements, which can occur due to variation of e.g. temperature. The beam monitors allow also absolute measurements of the charge generated in the DUT when properly calibrated. There are two conceptually different versions of the beam monitors: In-Beam monitor and Beam-split monitor. The In-beam monitor is mounted on the beam expander and monitors the intensity at the output from the optical system. A single monitor can be used for all wavelengths. The Beam-split monitor is used before the optical system and is wavelength specific. Both systems are rather complementary in their use and enjoy advantages and disadvantages in specific fields of application (see manuals).

Types of beam monitors
In-Beam beam monitor BM-01 A
Beam-split monitor BM-02 A